Glow Discharge Mass Spectroscopy Study of Ion Concentrations of Joints in Anodic Bonding of Borosilicate Glass to Ultrathin Silicon

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2016/11/01

タイトル(英語): Glow Discharge Mass Spectroscopy Study of Ion Concentrations of Joints in Anodic Bonding of Borosilicate Glass to Ultrathin Silicon

著者名: Takaki Itoh (Industrial Technology Center of Wakayama Prefecture)

著者名(英語): Takaki Itoh (Industrial Technology Center of Wakayama Prefecture)

キーワード: GDMS，ion concertation，anodic bonding，borosilicate glass，ultrathin silicon

要約(英語): Ion concentrations in the joints of borosilicate glass anodically bonded to ultrathin silicon were measured by glow discharge mass spectroscopy (GDMS), a highly conventional and sensitive method that measures profiles up to depths of 100 μm. The ion migration behavior was also investigated. The bonding current was an exponential function of the silicon thickness. All cations in the glass migrated towards the cathode, whereas the non-bridging oxygen ions were retained in the glass, possibly because of anodic bonding in the negatively charged depletion layer formed adjacent to the silicon-Tempax(R) boundary. The anodic bonding is apparently related to the different migration lengths of the oxygen and silicon ions. The lower migration length of the oxygen ions may result from the lower migration length of the ionized cations. These findings confirm the utility of GDMS in investigating the impact of joints in anodic bonding.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.136 No.11 （2016） 特集：マイクロマシン・MEMSを支えるナノテク技術

本誌掲載ページ: 478-481 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/11/136_478/_article/-char/ja/