真空紫外光によるシリコーンのガラス化を利用したガラス製モスアイ構造の作製法

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2016/11/01

タイトル(英語): Fabrication Method for Moth-eye Structure Made of Glass Using Vacuum Ultraviolet Light Vitrification of Silicone

著者名: 橋本　優生（東京工業大学），茂木　克雄（東京工業大学），山本　貴富喜（東京工業大学）

著者名(英語): Yuki Hashimoto (Tokyo Institute of Technology), Katsuo Mogi (Tokyo Institute of Technology), Takatoki Yamamoto (Tokyo Institute of Technology)

キーワード: モスアイ，ナノインプリント，ガラス化，シリコーンゴム，表面改質　　Moth-eye，Nanoimprint，Vitrification，Silicon rubber，Surface modification

要約(英語): Antireflection coating on glass is one of the important issues in optical industry. Moth-eye structure, which shows an anti-reflection effect at wide range of incident angle and wavelength, has been paid attention as a key technology for anti-reflection coating in developing optical devices. However, the conventional fabrication methods have several drawbacks, which is difficult to fabricate onto a curved surfaces and large area at low cost. In this work, we proposed and experimentally demonstrated a new fabrication method using photo-curable silicone rubber and vitrification by vacuum ultraviolet light (VUV) to develop glass-made moth-eye structure using printing method. As a result, the fabricated moth-eye structure made of the silicon rubber showed 94.3% transparency and the VUV modified moth-eye structure showed the better performance over 95.5% transparency, compared with a plain glass surface of 92.0% in the visible light range from 470nm to 700nm.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.136 No.11 （2016） 特集：マイクロマシン・MEMSを支えるナノテク技術

本誌掲載ページ: 488-492 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/136/11/136_488/_article/-char/ja/