TiNを用いた梁構造マイクロヒータの作製と評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/08/01

タイトル(英語): Fabrication and Evaluation of Suspended Micro-Heater using TiN

著者名: 伊藤　浩（東京工業高等専門学校），川又　由雄（東京工業高等専門学校），新國　広幸（東京工業高等専門学校）

著者名(英語): Hiroshi Ito (National Institute of Technology, Tokyo College), Yoshio Kawamata (National Institute of Technology, Tokyo College), Hiroyuki Nikkuni (National Institute of Technology, Tokyo College)

キーワード: 梁構造，マイクロヒータ，TiN薄膜，反応性スパッタリング　　suspended structure，micro heater，TiN film，reactive sputtering

要約(英語): In this study, suspended micro-heater using TiN for decreasing power dissipation was fabricated and evaluated. The self-supporting film of the suspended filament was developed by the low compressive stress SiO2 film deposited by the dc reactive sputtering method with rf substrate bias and the post annealing at 900℃. In the suspended structure process, single photolithography process and two wet etching process of HF and KOH solution were used. The power dissipation of the suspended heaters was obtained about 70mW and it is indicated that the power dissipation is able to reduce than the other structure in previous research. Then, it is expected that the TiN micro-heater using suspended structure is applicable to several MEMS sensors.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.8 （2020）

本誌掲載ページ: 209-213 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/8/140_209/_article/-char/ja/