Double-Deck MEMS Electrostatic Vibrational Energy Harvester with Airborne Interconnection

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2022/09/01

タイトル(英語): Double-Deck MEMS Electrostatic Vibrational Energy Harvester with Airborne Interconnection

著者名: Hiroaki Honma (Institute of Industrial Science, The University of Tokyo), Hiroshi Toshiyoshi (Institute of Industrial Science, The University of Tokyo)

著者名(英語): Hiroaki Honma (Institute of Industrial Science, The University of Tokyo), Hiroshi Toshiyoshi (Institute of Industrial Science, The University of Tokyo)

キーワード: MEMS，energy harvester，electret，environmental vibration，double-deck

要約(英語): Lowering internal impedance, i.e., stray capacitance and resistance, is essential to enhance the output power of microelectromechanical system (MEMS) vibrational energy harvesters particularly when the structure is made of a silicon-on-insulator (SOI) wafer which has a distributed stray capacitance across the buried oxide (BOX) layer. Instead of using silicon as a material for electrical interconnection, we used an out-of-plane aluminum bonding wire to complete the on-chip electrical interconnection between the contact pads on the chip frame and the suspended movable electrodes. Compared with the conventional design using silicon-based interconnections, the maximum deliverable power has been enhanced almost six-fold because of the reduced stray capacitance between the SOI layer and the substrate, as well as reduced internal electrical resistance. The mechanical stability of the bonded wire during the excitation vibration has also been experimentally confirmed. A typical power density of 763 μW/cm3 is obtained when excited by 0.5 G (1 G = 9.8 m/s2) sinusoidal vibrations at 157 Hz.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.142 No.9 （2022） 特集：次世代社会基盤を支えるIoT，センシングシステムのための要素技術

本誌掲載ページ: 215-219 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/142/9/142_215/_article/-char/ja/