セラミック基台を用いた高感度Cr-N薄膜圧力センサ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/12/01

タイトル(英語): Highly Sensitive Cr-N Thin Film Pressure Sensor using Ceramic Structure Body

著者名: 皆川　直祐（日本ファインセラミックス（株）），水尾　仙人（日本ファインセラミックス（株）），丹羽　英二（（公財）電磁材料研究所）

著者名(英語): Naohiro Minakawa (Japan Fine Ceramics Co., Ltd.), Norihito Mizuo (Japan Fine Ceramics Co., Ltd.), Eiji Niwa (Research Institute for Electromagnetic Materials)

キーワード: 水素，ジルコニア，Cr-N薄膜，圧力センサ，基準圧力室，ダイアフラム構造　　hydrogen，zirconia，Cr-N thin film，pressure sensor，reference pressure chamber，diaphragm structure

要約(英語): The authors have investigated a high-sensitive hydrogen pressure sensor at low pressure range. In this paper, a new pressure sensor element composed of a zirconia base and a Cr-N thin film, which are not affected by hydrogen, was proposed. It was considered that such a sensor element could be placed into hydrogen gas and then detect directly the pressure variation in the pressure vessel. Also, the sensor element has a diaphragm structure with a reference pressure chamber in the base. Therefore, it was thought that the element could do the sensitive pressure sensing due to the Cr-N thin films which can detect a strain sensitively. The sensor elements mentioned above were fabricated and the experiments applying pressure to them were carried out. As a result, it was revealed that the sensor enabled stable and high-sensitive pressure detection in the low-pressure range less than 1MPa. The pressure sensor of this study can be expected as a new type of pressure sensor for hydrogen.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.12 （2023）

本誌掲載ページ: 383-390 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/12/143_383/_article/-char/ja/