エバネセント波を利用した微細加熱装置に関する研究

カテゴリ: 全国大会

論文No: 4-199

グループ名: 【全国大会】平成21年電気学会全国大会論文集

発行日: 2009/03/15

タイトル(英語): Research of Microwave Heating System Using Evanescent Wave for Soldering Fine Circuits

著者名: 孫勝国 (茨城大学),川嶋友紘 (茨城大学),三枝幹雄 (茨城大学),佐藤学 (日本電産コパル)

キーワード: 加熱装置|高周波|エバネセント波|共振器|半田付け|整合器

要約(日本語): The microwave heating system using evanescent wave for soldering fine circuits has been researched and developed. The evanescent wave is useful for fine structure device heating by microwave very locally. The heating system consists of a radio frequency (RF) source, a matching circuit and a resonator for enhancing the magnetic field. The performance of RF source is at a frequency band of 2.3-2.35 GHz and a output RF power of 100-200 W. The experiments of heating lead-free solders have been done with the microwave at a frequency of about 2.33 GHz and a power of about 200 W. The electromagnetic field in the resonator was enhanced by the matching circuit i.e. a double-slug tuner. The results of the heating experiments proved that the lead-free solder can be heated locally to be melted with microwave in the resonator.

原稿種別: 日本語

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