1μs方形波電圧によるN2/He大気圧非平衡プラズマの生成と診断

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2012/04/01

タイトル(英語): Generation and Diagnostics of N2/He Atmospheric-pressure Non-equilibrium Plasma by 1μs Rectangular Pulse Voltage

著者名: 白井　博之（防衛大学校電気電子工学科），中野　俊樹（防衛大学校電気電子工学科），北嶋　武（防衛大学校電気電子工学科）

著者名(英語): Hiroyuki Shirai (Dept. of Electrical & Electronic Eng., National Defense Academy), Toshiki Nakano (Dept. of Electrical & Electronic Eng., National Defense Academy), Takeshi Kitajima (Dept. of Electrical & Electronic Eng., National Defense Academy)

キーワード: 大気圧プラズマ，非平衡プラズマ，短パルス電圧，ガス温度，発光分光法，窒素第二正帯　　atmospheric-pressure plasma，non-equilibrium plasma，short-pulse voltage，gas temperature，optical emission spectroscopy，N2 second positive system bands

要約(英語): By application of 1μs rectangular pulse voltage, N2/He atmospheric-pressure non-equilibrium plasma is generated. The temporally resolved optical emission spectra of the N2 second positive system (2PS) bands are measured to diagnose the plasma characteristics such as the gas temperature and the excitation of N2. Remarkable deviation of the 2PS (0,0) band spectra from the theoretical spectra, which are computed by assuming the Boltzmann distribution of N2 population among the rotational levels, is observed, while the (0,3) band spectra are represented well by the computed spectra. These can be explained by the consequence of the high excitation rate of N2 to the C 3Πu state. The gas temperature is evaluated to be 350±30K from the N2 rotational temperature determined by nonlinear least square fitting of the theoretical spectra to the measured (0,3) band spectra.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.132 No.4 （2012） 特集：プロセスプラズマの発生と応用

本誌掲載ページ: 312-318 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/132/4/132_4_312/_article/-char/ja/